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ADXL377BCPZ-RL Fiches technique(PDF) 8 Page - Analog Devices |
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ADXL377BCPZ-RL Fiches technique(HTML) 8 Page - Analog Devices |
8 / 12 page ADXL377 Data Sheet Rev. 0 | Page 8 of 12 THEORY OF OPERATION The ADXL377 is a complete 3-axis acceleration measurement system with a typical measurement range of ±200 g. The ADXL377 contains a polysilicon, surface-micromachined sensor and signal conditioning circuitry to implement an open-loop acceleration measurement architecture. The output signals are analog voltages that are proportional to acceleration. The accelerometer can mea- sure the static acceleration of gravity in tilt-sensing applications, as well as dynamic acceleration resulting from motion, shock, or vibration. The sensor is a polysilicon, surface-micromachined structure built on top of a silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide resistance against acceleration forces. Deflection of the structure is mea- sured using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180° out-of-phase square waves. Acceleration deflects the moving mass and unbalances the differential capacitor, resulting in a sensor output whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to determine the magnitude and direction of the acceleration. The demodulator output is amplified and brought off chip through a 32 kΩ resistor. The user then sets the signal bandwidth of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing. MECHANICAL SENSOR The ADXL377 uses a single structure for sensing the accelera- tion in the x-axis, y-axis, and z-axis. As a result, the three sense directions are highly orthogonal with little cross-axis sensitivity. Mechanical misalignment of the sensor die to the package or misalignment of the package to the PCB is the chief source of cross-axis sensitivity. Mechanical misalignment can be calibrated at the system level. PERFORMANCE Rather than using additional temperature compensation circuitry, the ADXL377 uses innovative design techniques to ensure high performance. As a result, there is neither quantization error nor nonmonotonic behavior, and temperature hysteresis is very low. |
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