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9699108 Fiches technique(PDF) 2 Page - Agilent(Hewlett-Packard) |
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9699108 Fiches technique(HTML) 2 Page - Agilent(Hewlett-Packard) |
2 / 4 page 2 Technical Specification Pumping speed ISO 160 / CF 8” N 2 He H 2 Ar 660 L/s 640 L/s 480 L/s 625 L/s Gas throughput at full rotational speed (with recomm. forepump)* Ambient Temp. (25 °C) Water Temperature. (25 °C, 50 L/h) He 7.9 mbarL/s 467 SCCM 10.4 mbarL/s 615 SCCM N2 4.3 mbarL/s 255 SCCM 6.2 mbarL/s 367 SCCM Ar 1.5 mbarL/s 89 SCCM 3.3 mbarL/s 195 SCCM (*) Backing pump 11.6 m3/hr Compression ratio and foreline tolerance* N 2 He H 2 Ar >1E+11 2E+08 3E+06 >1E+11 10 mbar 10 mbar >4 mbar 8.5 mbar (*) Foreline Tolerance defined as the pressure at which the turbopump still produce a compression of 100 and estimated in water cooling mode Base pressure with recomm. forepump < 1 x 10-10 mbar (< 1 x 10-10 Torr) Inlet flange ISO 160K, ISO 160F, CFF 8” Foreline flange NW25 (NW40 as optional accessory) Rotational speed Auto setting from 40'800 RPM to 49'500 RPM Start-up time < 5 minutes Technical Specification Recommended forepump DS302 IDP10 IDP15 Operating position Any Oper. ambient temperature +5 °C to +35 °C Rel. humidity of air 0 - 90 % (not condensing) Bakeout temp. ISO pump: 80 °C at inlet flange CFF pump: 120 °C at inlet flange Lubricant Permanent grease lubrication Cooling requirements Air cooling Air temperature from +5°C to 35°C Water cooling Water temperature from +15°C to +25°C Water flow min. 100L/h Noise Pressure Level (at 1m at full speed) 43dB(A) Storage temperature -40°C to +70°C Max altitude 3000 m Weight kg (lbs) ISO160K ISO160F CFF 8” 20.6 Kg / 45.3 lbs. 22.6 Kg / 49.7 lbs. 22 Kg / 48.4 lbs. Conformity to norms EMC (Control Units) Safety (CE/CSA) Machinery Directive Low Voltage Directive EMC Directive (Control Units) ROHS 61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU Outline Drawing ISO160K ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 PURGE SCREW CFF 8" PURGE SCREW Ø207.5 [8.17] Ø179.86 [7.08] 115.25 [4.54] 117.25 [4.62] 12° Ø207.5 [8.17] Ø202.44 [7.97] 115.25 [4.54] 117.25 [4.62] 12° ISO160K ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 ELECTRICAL CONNECTOR VENT SCREW FORELINE FLANGE KF25 PURGE SCREW CFF 8" PURGE SCREW Ø207.5 [8.17] Ø179.86 [7.08] 115.25 [4.54] 117.25 [4.62] 12° Ø207.5 [8.17] Ø202.44 [7.97] 115.25 [4.54] 117.25 [4.62] 12° Technical Specification 3D Drawings available for download |
Numéro de pièce similaire - 9699108 |
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Description similaire - 9699108 |
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