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9699344 Fiches technique(PDF) 2 Page - Agilent(Hewlett-Packard) |
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9699344 Fiches technique(HTML) 2 Page - Agilent(Hewlett-Packard) |
2 / 4 page 2 Technical Specification Pumping speed ISO 100 / CF 6” ISO 160 / CF 8” N 2 He H 2 Ar 250 L/s 255 L/s 220 L/s 250 L/s 250 L/s 255 L/s 220 L/s 250 L/s Gas throughput at full rotational speed (with recomm. forepump) Ambient Temp. (25 °C) Water Temp. (25 °C, 50 L/h) N 2 170 SCCM 170 SCCM Ar 110 SCCM 110 SCCM Compression ratio and foreline tolerance N 2 He H 2 Ar > 1 x 1011 > 1 x 108 1.5 x 106 > 1 x 1011 >10 mbar >10 mbar >4 mbar >10 mbar Base pressure with recommended forepump (5 m3/h) < 1 x 10-10 mbar (< 1 x 10-10 Torr) Foreline flange KF16 NW (KF25 - optional) Rotational speed 60000 rpm (1010 Hz driving frequency) Start-up time < 3 minutes Technical Specification Recommended forepump mechanical: Agilent DS 102 dry pump: Agilent IDP-7 Operating position Any Oper. ambient temperature +5 °C to +35 °C Rel. humidity of air 0 to 90% (not condensing) Bakeout temperature 80 °C at inlet flange max (ISO flange) 120 °C at inlet flange max (CFF flange) Lubricant Permanent grease lubrication Cooling requirements Forced air (5- 35 °C ambient temperature) Water (mandatory if ambient temp. > 35 °C) Water temperature from +15°C to +25°C Water flow min. 100L/h Coolant water Minimum flow: 50 L/h (0.89 GPM) Temperature: +15 °C to +30°C Pressure: 3 to 5 bar (45 to 75 psi) Noise Pressure level < 50 dB(A) at 1 meter Max altitude 3000 m Weight kg (lbs) Pump ISO 100 Pump CFF 6’’ Pump ISO 160 Pump CFF 8’’ 5.5 kg (12.3) 7.5 kg (16.5) 5.7 kg (12.6) 9.7 kg (20.9) Conformity to norms EMC (Control Units) Safety (CE/CSA) ROHS 61326-1 DIR 2006/42/CE DIR 2011/65/EU Outline Drawing Technical Specification 3D Drawings available for download ISO 100K CFF 6" FORELINE FLANGE KF16 ELECTRICAL CONNECTOR WATER COOLING VENT SCREW FORELINE FLANGE KF16 ELECTRICAL CONNECTOR WATER COOLING PURGE SCREW PURGE SCREW VENT SCREW 144 [5.67] Ø 144 [5.67] 86.29 [3.40] 38 [1.50] 86.5 [3.41] 36° 27° 86.29 [3.40] 38 [1.50] 86.5 [3.41] 36° 27° 39° 39° Ø |
Numéro de pièce similaire - 9699344 |
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Description similaire - 9699344 |
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