SM5106
2001-2002
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com
CHARACTERISTICS FOR SM5106 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min.
Typ.
Max.
Units
Notes
Excitation Voltage
0
5.0
15
V
1
Excitation Current
0
1.5
2.5
mA
1
Span (FS Range)
15 PSI
30 PSI
60 PSI
150 PSI
75
85
85
100
100
110
125
145
125
130
150
195
mV
mV
mV
mV
2
Offset
-35
8
35
mV
TC Span
-24
-19
-15.5
%FS/100°C
3
TC Offset
-7
-1
+7
%FS/100°C
3
TC Resistance
+24
+27.5
+33
%/100°C
3
Linearity
-0.45
-0.15
+0.45
%FS
4
Bridge Impedance
4
5
6
k
Ω
Proof Pressure
3X
Rated FS
Burst Pressure
5X
Rated FS
Operating Temperature
-40
+125
°C
Storage Temperature
-55
+150
°C
Notes:
1.
Bridge may be driven with positive or negative excitation; positive output for positive pressure applied to circuit side of die
when bridge is driven with positive voltage.
2.
Measured at 5V constant voltage excitation.
3.
Measured from 0 to 70 C
4.
Defined as best straight line.
Vsub
Sig-
Sig+
-Vexc
+Vexc
0.13 mm
0.30 mm
1.56 mm
0.20 mm
0.20 mm
0.05
mm
0.40
mm
1.56
mm
SM5106 (1.56 mm square as sawn)
Covered under USA Mask-Copyright
See separate Application Notes for typical range of variation in Saw
dimensions.
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Pressure Ranges
PSI
5106
15
015
30
030
60
060
150
150
ORDERING INFORMATION:
SM5106 - 015 - A
Model Number
Pressure
range
Pressure
Type
A: Absolute (only)
Rev 1.2 8_02
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